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The purpose of this Document is to provide specifications for silane (SiH4) that is used in the semiconductor industry
12-0116 (technical revision)
This Test Method applies to all types of in-line components used in gas delivery systems for precise delivery of gaseous species used in semiconductor manufacturing
SEMI A1-1025 (technical revision)
AFM uses a stylus or probe tip that interacts with the surface of interest and moves at a known speed across the surface while recording the up and down movement of the tip relative to the surface
C00602 - SEMI C6.2 - パイプラインガスとして授受されるグレード20/0.02酸素に対するパーティクル仕様 StdPbc-0616 The purpose of this DocumentNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Gases Global Technical Committee2011912global Audits and Reviews Subcommittee201111www. semiviews. org www. semi. org1993200211 NOTICE: This Document is no longer supported by the global technical committee. It has been replaced by
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