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but may find increased importance in the future
SEMI C102-0621 (first published)
orgで入手可能となる。初版は1994年発行，前版は2010年3月に発行された。
SEMI F40 — Practice for Preparing Liquid Chemical Distribution Components and Neat Polymers for Chemical Testing
11-0301 (first published)
G00800 - SEMI G8 - Test Method for Gold Plating StdVol-Equipment Automation Hardware but may find increased importanceNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This Test Method describes procedures to determine gold plating quality. These methods apply to gold plating on cofired ceramic or metal packages. The grade, hardness, and thickness of the gold plating shall be specified
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