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SEMI F78-0611 (Reapproved 0917)
• Authentication of consistency of recipes in equipment with Recipe Server by providing an optional Pre-Execution Check mechanism
orgで入手可能となる。初版は1990年発行。前版は2002年11月発行。
The alphanumeric marking of this Specification is valid for a broad range of wafer products (e
SEMI E17-1011 (technical revision)
M07500 - SEMI M75 - Specification for Polished Monocrystalline Gallium Antimonide Wafers StdPbc-1020 SEMI F78-0611 (Reapproved 0917)The purpose of this Document is to define standard descriptions for the parameters to be specified in the procurement and supply of round wafers of gallium antimonide (GaSb) monocrystalline material. This Specification covers the information required for the procurement of round, flatted GaSb wafers and the standard dimensional and orientation conventions for the supply of such wafers. Referenced SEMI StandardsSEMI MF26 Test Method for Determining the